Conventional STEM/TEM
Conventional STEM/TEM
JEM-2100F
| Installation location | ITO Campus・CE21 | |
|---|---|---|
| Accelerating voltage | 120，160，200 | |
| Emission Gun | T-FEG | |
| TEM resolution(nm) | 0.23 point 0.1 lattice |
|
| STEM | minimum probe diameter | － |
| HAADF | ○ | |
| ABF | － | |
| XEDS | type | SDD |
| solid angle | 0.3sr | |
| energy resolution | 130eV | |
| EELS | － | |
| 3D tomography | － | |
| Sample inclination angle | X:±36 Y:±31 |
|
| Convergent electron diffraction | － | |