New ARM STEM/TEM
New ARM STEM/TEM
JEM-ARM300F2
| Installation location | ITO Campus・CE21 | |
|---|---|---|
| Accelerating voltage | 80,200,300 | |
| Emission Gun | C-FEG | |
| TEM resolution(nm) | 0.060nm |
|
| STEM | minimum probe diameter | 0.059 nm |
| HAADF | 〇 | |
| ABF | 〇 | |
| XEDS | type | SDD |
| solid angle | 1.1 sr | |
| energy resolution | 130 eV | |
| EELS | － | |
| 3D tomography | － | |
| Sample inclination angle | X:±37,Y:±31 | |
| Convergent electron diffraction | 〇 | |
| Electron Biprism | 〇 | |