Dual beam FIB / Triple Beam FIB
Dual beam FIB
Triple Beam FIB
| DualBeamTM FIB-SEM Quanta 3D 200i (ThermoFisher Scientific) |
Triple BeamR FIB-SEM-Ar MI4000L (Hitachi High Technologies) |
||
| SEM | Electron Source | Tungsten filament | ZrO/W Schottky emission |
|---|---|---|---|
| Acceration Voltage | 0.5 kV - 30 kV | 0.1 kV - 30 kV | |
| Signal Detector | SE detector | Upper SE detector | |
| - | Lower SE/BSE detector | ||
| - | EsB detector | ||
| - | STEM detector | ||
| FIB | Ion Source | Ga LMIS | Ga LMIS |
| Acceration Voltage | 2 kV - 30 kV | 1 kV - 30 kV | |
| Maximum Beam Current | 65 nA | 90 nA | |
| FIB-SEM geometory | V-shape (52 deg) | Orthogonal L-shape (90 deg) | |
| GIS | Tungsten, Carbon | Tungsten, Carbon | |
| Maximum Specimen Dimensions | 100 x 50 x 50 mm | 4 x 4 x 2 mm | |
| Micro-probe manipulator | Omni Probe | Kleindiek | |
| Low Energy Ion Beam | - | Ar | |
| 3D serial sectioning | - | Hitachi Cut & See | |
| XEDS Analysis | - | Oxford X-MaxN 150mm2 XEDS | |
| Cryo System | Quorum Technologies PolarPrep 2000 | Hitachi side entry Cryo-transfer Holder | |