Micro-Calorimeter FESEM
Micro-Calorimeter FESEM
TES+ULTRA55
The microcalorimeter XEDS detector allows high energy resolution analysis of 10 eV at 6 keV compared to that of 130 eV in conventional SDD XEDS detectors. This high resolution is achieved by the use of the transition edge of a superconductor cooled down to below 0.1 K by a dilution refrigerator. The wide selection of acceleration voltages (20 V to 30 kV) and multiple electron detectors (Everhart-Thornley SE, In-lens SE, AsB, EsB) offers not only SEM images of surface topology but also compositional information. Also an EBSD detector is available for obtaining crystal-orientation distribution maps.
| Installation location | ITO Campus・CE21 | ||
|---|---|---|---|
| Accelerating voltage | 0.1-30 | ||
| Emission Gun | T-FEG | ||
| TEM resolution(nm) | 1.0-4.0 SEM image |
||
| STEM | minimum probe diameter | － | |
| HAADF | － | ||
| ABF | － | ||
| XEDS | type | TES | Si |
| solid angle | 0.0022 sr | 0.026 sr | |
| energy resolution | 20 eV | 130 eV | |
| EELS | － | ||
| 3D tomography | － | ||
| Sample inclination angle | T:-3～70 R:360 |
||
| Convergent electron diffraction | － | ||