Atomic Resolution Analytical TEM
Atomic Resolution Analytical TEM
JEM-ARM200CF
This atomic resolution analytical transmission electron microscope is an advanced version of the ARM200F, equipped with a cold-FEG and double aberration correctors. Using the improved STEM probe corrector, coherent axial aberrations up to 4th order, as well as 5th order spherical aberrations and six-fold astigmatisms are corrected.Along with the bright and narrow energy spread cold-FEG, the GIF spectrometer offers high resolution EELS as well as high efficient XEDS analysis using the dual-SDD system with a collection solid angle close to 2 sr. Acceleration voltages are selectable from 200, 120, 80, 60 kV and 30 kV. This wide range will allow more varieties of materials to be researched in atomic resolution HRTEM, HAADF-, BF- and ABF-STEM, as well as atomic resolution elemental mapping and electron state analysis.
| Installation location | ITO Campus・CE21 | |
|---|---|---|
| Accelerating voltage | 30,60,80,120,200 | |
| Emission Gun | C-FEG*² | |
| TEM resolution(nm) | 0.11 point 0.10 lattice |
|
| STEM | minimum probe diameter | 0.1 nm |
| HAADF | 〇 | |
| ABF | 〇 | |
| XEDS | type | SDD |
| solid angle | 2.0 sr | |
| energy resolution | 130 eV | |
| EELS | Gatan Imaging Filter | |
| 3D tomography | ○ | |
| Sample inclination angle | X,Y:±25 | |
| Convergent electron diffraction | 〇 | |