Performance comparison table of Ar ion milling equipment

	PIPS GATAN M-691	PIPS Ⅱ GATAN M-695	TEM MILL Fischione M-1050	Nano MILL Fischione M-1040	Ionslicer JEOL M-09100 IS
Ion acceleration voltage	100 eV ～6 keV	100 eV ～8 keV	100 eV ～6 keV	50 eV ～4 keV	1～8 keV
Diameter of Ion beam	minimum 350 µm	minimum 350 µm	minimum 350 µm	minimum 4 µm	500 µm
Current of Ion beam	max 10mA/cm2	max 10mA/cm2	max 100mA/cm2	max 8mA/cm2	Ion beam 305μA（8keV）
Angle	0 ～±10°	0 ～±10°	0 ～±10°	0 ～±12°	max±6°
Shape of sample	3mmφ or 2.3mmφplate	3mmφ plate	3mmφ plate	3mmφ plate or over 5×10mm slice	2.8×0.5×0.1 mm rectangle
Removal of damage layer with FIB	－	〇	－	〇	－
planview	〇	〇	〇	－
Cross-section	△	△	△	－	〇