Cs-Corrected STEM/TEM
Cs-Corrected STEM/TEM
JEM-ARM200F
Equipped with a Schottky FEG, double aberration correctors and a highly stable specimen stage, this atomic resolution analytical electron microscope is capable to obtain HAADF-, BF-, ABF-STEM and HRTEM images in atomic resolutions. Also with the use of the large sensing area (100 mm2) SDD XEDS detector, this TEM has the ability of atomic resolution elemental mapping. With the GIF spectrometer, STEM-EELS will allow local analysis of electron energy states.
Installation location | ITO Campus・CE21 | |
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Accelerating voltage | 60,80,120,200 | |
Emission Gun | T-FEG*¹ | |
TEM resolution(nm) | 0.11 point 0.10 lattice |
|
STEM | minimum probe diameter | 0.2 nm |
HAADF | 〇 | |
ABF | 〇 | |
XEDS | type | SDD |
solid angle | 0.8 sr | |
energy resolution | 130 eV | |
EELS | Gatan Imaging Filter | |
3D tomography | - | |
Sample inclination angle | X,Y:±25 | |
Convergent electron diffraction | 〇 |